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Rapid Thermal Processing Equipment
| Item No.: | RTP-150 Front loading |
Supplier Details
Country: Taiwan
City: Kaohsiung City 802
Address: 3F.-2, No.372, Zhongzheng 1st Rd., Lingya Dist.
TEL: +886-7-7225117
Fax: +886-7-7232465
Online Showroom:
74 Products
Specification:
1. Quartz glass chamber with integrated gas in- and outlet
2. Heating: with Infrared Lamps, total power: 21 kW
3. top and bottom heating
4. Loading system: quartz glass tray in the process chamber
5. Loading area: up to 156 mm wafer size
6. Controller: fast PID temperature process controller
7. 50 programs with each 50 steps storable
8. SPS controller, SIMATIC
9. 7" Touch Panel for comfortable programming and process control
10. Vacuum up to 10exp.-3 hPa (for Vacuum up to 10exp.-6 hPa see model RTP-150-HV)
11. Max. Temperature: 1000 °C (higher on request)
12. Ramp up rate: free programmable, max. 75 °K/sec
13. Ramp down rate: T= 1000 °C up to 400 °C max. 200 K/min
14. T=400 °C up to 100 °C max. 30 K/min.
15. Electricity: CEE 3x32 A, 230 V, 3 Phase, +N, 21 kW
16. Cooling: Water cooling required
17. Dimensions: 505 x 504 x 550 mm (WxHxD)
18. Weight: approx. 65 kg
【Brand： UNITEMP/GERMAN 】
1. Quartz glass chamber with integrated gas in- and outlet
2. Heating: with Infrared Lamps, total power: 21 kW
3. top and bottom heating
4. Loading system: quartz glass tray in the process chamber
5. Loading area: up to 156 mm wafer size
6. Controller: fast PID temperature process controller
7. 50 programs with each 50 steps storable
8. SPS controller, SIMATIC
9. 7" Touch Panel for comfortable programming and process control
10. Vacuum up to 10exp.-3 hPa (for Vacuum up to 10exp.-6 hPa see model RTP-150-HV)
11. Max. Temperature: 1000 °C (higher on request)
12. Ramp up rate: free programmable, max. 75 °K/sec
13. Ramp down rate: T= 1000 °C up to 400 °C max. 200 K/min
14. T=400 °C up to 100 °C max. 30 K/min.
15. Electricity: CEE 3x32 A, 230 V, 3 Phase, +N, 21 kW
16. Cooling: Water cooling required
17. Dimensions: 505 x 504 x 550 mm (WxHxD)
18. Weight: approx. 65 kg
【Brand： UNITEMP/GERMAN 】