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Rapid Thermal Processing System
| Item No.: | RTP-150-HV (High Vacuum) Front loading |
Supplier Details
Country: Taiwan
City: Kaohsiung City 802
Address: 3F.-2, No.372, Zhongzheng 1st Rd., Lingya Dist.
TEL: +886-7-7225117
Fax: +886-7-7232465
Online Showroom:
74 Products
Specification:
1. Quartz glass chamber with integrated gas in- and outlet
2. Heating: with Infrared Lamps, total power: 21 kW
3. Loading area: up to 156 mm wafer size
4. Controller: fast PID temperature process controller
5. 50 programs with 50 steps each storable
6. Vacuum up to 10exp.-6 hPa (Turbomolecular pump and vacuum measurment included)
7. Max. Temperature: 1000 °C (higher on request)
8. Ramp up rate: free programmable, max. 75 °K/sec
9. Ramp down rate: T= 1000 °C up to 400 °C max. 200 K/min
10. T=400 °C up to 100 °C max. 30 K/min.
11. Cooling: Water cooling required
12. Good service
13. Please mail us for more details
14. Suitable for laboratory and research department
【Brand： UNITEMP/GERMAN 】
1. Quartz glass chamber with integrated gas in- and outlet
2. Heating: with Infrared Lamps, total power: 21 kW
3. Loading area: up to 156 mm wafer size
4. Controller: fast PID temperature process controller
5. 50 programs with 50 steps each storable
6. Vacuum up to 10exp.-6 hPa (Turbomolecular pump and vacuum measurment included)
7. Max. Temperature: 1000 °C (higher on request)
8. Ramp up rate: free programmable, max. 75 °K/sec
9. Ramp down rate: T= 1000 °C up to 400 °C max. 200 K/min
10. T=400 °C up to 100 °C max. 30 K/min.
11. Cooling: Water cooling required
12. Good service
13. Please mail us for more details
14. Suitable for laboratory and research department
【Brand： UNITEMP/GERMAN 】