Wafer Surface Defect Inspection

Item No.:

10-6,WaferEye 810

Supplier Details

Microtek International, Inc.

Country: Taiwan

City: Hsinchu City 30075

Address: No. 6, Industry East Road 3, Science Based Industrial Park

TEL: +886-3-5772155

Fax: +886-3-5772598

Online Showroom: 55 Products

Product Details Supplier Profile

AOI Automatic Optical Inspection

WaferEye810, designed for 8-inch wafers, is an advanced system devoted to the precise detection of surface defects on wafers, ensuring high-quality inspection. Through the integration of cutting-edge optical systems and advanced image processing techniques, this system excels in detecting surface defects as small as 10 x 10 µm in size, including scratches, breakages, cracks, abnormal PADs, and more. Intelligent software enables real-time image display and defect analysis, automatically documenting the coordinates of abnormal die chips along with defect details. This prevents flawed die chips from progressing to the next process, effectively reducing the risk of production costs.
The system's flexibility extends to customization, accommodating specific customer needs for inspection projects. It allows seamless adjustment of parameters for unique processes and product requirements, ensuring thorough inspection and enhanced detection rates. Opting for customized projects provides a tailored solution, ultimately elevating production efficiency.
Choosing our WaferEye810 inspection system signifies a commitment to both high quality and efficiency. Let's collaborate to lead the way in pioneering a new era of AOI inspection!

Features

Utilizes Line Scan detection method, supporting wafers of up to 8 inches in size
Equipped with a high-resolution 2.8 µm camera for clear capture of surface defects on wafers.
Detects defects with a minimum size of around 10 x 10 µm.
Capable of inspecting surface defects before and after wafer cutting.
Capable of detecting defects on the wafer surface and bonding pads (PAD), with subsequent defect analysis.
Adaptable to different industry requirements, allowing for the replacement or addition of inspection items.
Equipped with a high-performance computer and a touch screen, ensuring convenient operation and real-time image inspection.
Intuitive intelligent software enhances operational efficiency and maintenance.
Supports offline inspection, providing flexibility to meet the demands of various production lines.

WaferEye810 Brochure

Specifications
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Inspection Wafer Type: Wafer Glass Substrate
Inspection Wafer Size: ≦ 8-inch wafer
Inspection Defects: Wafer: Scratch, Chipping, Crack；PAD: Discoloration, Contamination, Deformation
Detection Size: 10 x 10 um (Min.)
Inspection Light Source: LED
Image Capture Device: Line Scan Camera
Resolution: 2.8 um/pixel
Tact Time: 500 sec./pcs (8-inch)
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Inspection Equipment: WaferEye810
Inspection Software: Defect Inspection System
Equipment Dimensions: 170 x 130 x 220 cm
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Microtek Has the Whole World in View Founded in 1980, Microtek International., Inc. has been led by Chairman, Mr. Benny Hsu, and continually adheres to the business philosophy of pursuing innovation, quality and service. Supported by the staunch backing of teams in innovation, manufacturing, servicing and sales, Microtek is thus able to build up its private brand. In 1984, Microtek released the world’s first black & white sheet-fed scanner. Innovative technology has always been the core foundation and also retains good reputation constantly for Microtek. Thus, Microtek achieves many of “The World’s First” in several categories. With thirty-years’ consistent investments in researching and developing of technology for image capturing and analyzing, Microtek successively launch a series of imaging solutions and applications for different categories, such as large-size document scanners for digital archiving, object scanners which can capture images looking like stereoscopic, and applications for biology analyzation, industry inspection and medical inspection. About Microtek Founded: 1980 Headquarters: No. 6, Industry East Road 3, Science-Based Industrial Park, Hsinchu 30075, Taiwan Amount of Capital: 2 billion New Taiwan Dollars Numbers of Employees: 300 worldwide Official Website: www.microtek.com Products/Service  Processing of digital images (consuming/professional image scanning systems)  Management of digital documents (hi-speed document scanning system/multi-functions document scanning system)  Scanning applications for specialized categories (medical, industry and biology technology)  Professional image processing and document managing software  Customized collaborations and developments in specialized categories Microtek not only made itself to keep pace with HP, EPSON and Canon as one of top 4 brand scanners in USA but also was nominated as one of Top 10 Nation Brands in IT category in Mainland China. With superior quality, reasonable price and excellent service, Microtek would provide customers with professional products and technical supports. Do not hesitate to contact with us if you have any needs.

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Wafer Surface Defect Inspection

Wafer Surface Defect Inspection